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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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700 kPa Uncompensated Silicon Pressure Sensors
The MPX700 series device is a silicon piezoresistive pressure sensor providing a very accurate and linear voltage output -- directly proportional to the applied pressure. This standard, low cost, uncompensated sensor permits manufacturers to design and add their own external temperature compensating and signal conditioning networks. Compensation techniques are simplified because of the predictability of Motorola's single element strain gauge design. Features * Low Cost * Patented, Silicon Shear Stress Strain Gauge Design * Linearity to 0.5% (Max) Linearity * Easy to Use Chip Carrier Package Options * Ratiometric to Supply Voltage * 60 mV Span (Typ) * Absolute, Differential and Gauge Options Application Examples * Environmental Control Systems * Pneumatic Control Systems * Appliances * Automotive Performance Controls * Medical Instrumentation * Industrial Controls Figure 1 illustrates a schematic of the internal circuitry on the stand-alone pressure sensor chip.
PIN 3 + VS
MPX700 SERIES
0 to 700 kPa (0 - 100 psi) 60 mV FULL SCALE SPAN (TYPICAL)
BASIC CHIP CARRIER ELEMENT CASE 344-15, STYLE 1
DIFFERENTIAL PORT OPTION CASE 344C-01, STYLE 1 NOTE: Pin 1 is the notched pin.
PIN 2 + Vout X-ducer PIN 4 - Vout PIN 1 1 2
PIN NUMBER
Gnd +Vout 3 4 VS -Vout
Figure 1. Uncompensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X-ducer is directly proportional to the differential pressure applied. The absolute sensor has a built-in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the pressure (P1) side. This sensor is designed for applications where P1 is always greater than, or equal to P2.
Senseon and X-ducer are trademarks of Motorola, Inc. REV 5
Motorola Sensor Device Data (c) Motorola, Inc. 1997
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MPX700 SERIES
MAXIMUM RATINGS
Overpressure(8) (P2
Burst Pressure(8) (P2 Storage Temperature
v 1 Atmosphere) v 1 Atmosphere)
Rating
Symbol P1max P1burst Tstg TA
Value 2800 5000 - 40 to +125 - 40 to +125
Unit kPa kPa C C
Operating Temperature
OPERATING CHARACTERISTICS (VS = 3.0 Vdc, TA = 25C unless otherwise noted. P1
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 700 kPa) Temperature Hysteresis(5) (- 40C to +125C) Temperature Coefficient of Full Scale Span(5) Temperature Coefficient of Offset(5) Temperature Coefficient of Resistance(5) Input Impedance Output Impedance Response Time(6) (10% to 90%) Warm-Up (7) MPX700D MPX700A Symbol POP VS Io VFSS Voff V/P -- -- -- TCVFSS TCVoff TCR Zin Zout tR --
w P2; P2 v 1 Atmosphere.)
Typ -- 3.0 6.0 60 20 86 -- -- 0.1 0.5 -- 15 -- -- -- 1.0 20 Max 700 6.0 -- 90 35 -- 0.5 1.0 -- -- - 0.15 -- 0.4 550 1800 -- -- Unit kPa Vdc mAdc mV mV V/kPa %VFSS %VFSS %VFSS %VFSS/C V/C %Zin/C ms ms 0 -- --
Min
45 0 -- - 0.5 - 1.0 -- -- - 0.21 -- 0.34 400 750 -- --
MECHANICAL CHARACTERISTICS
Characteristic Weight (Basic Element, Case 344-15) Symbol -- Min -- Typ 2.0 Max -- Unit Grams
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * TCR: Zin deviation with minimum rated pressure applied, over the temperature range of - 40C to +125C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warm-up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized. 8. Basic Element only, Case 344-15. 9. P2 max : 500 kPa.
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Motorola Sensor Device Data
MPX700 SERIES
TEMPERATURE COMPENSATION Figure 2 shows the typical output characteristics of the MPX700 series over temperature. The X-ducer piezoresistive pressure sensor element is a semiconductor device which gives an electrical output signal proportional to the pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is sensitive to stresses produced in a thin silicon diaphragm by the applied pressure. Because this strain gauge is an integral part of the silicon diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors. However, the properties of the strain gauge itself are temperature dependent, requiring that the device be temperature compensated if it is to be used over an extensive temperature range. Temperature compensation and offset calibration can be achieved rather simply with additional resistive components
80 70 OUTPUT (mVdc) 60 50 40 30 20 10 0 PSI 0 kPa 20 140 40 60 80 560 OFFSET (TYP) 100 700 - 40C MPX700 VS = 3 Vdc P1 > P2
or by designing your system using the MPX2700 series sensors. Several approaches to external temperature compensation over both - 40 to +125C and 0 to + 80C ranges are presented in Motorola Applications Note AN840. LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range (Figure 3). There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2) a least squares best line fit. While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
70 LINEARITY + 25C SPAN RANGE (TYP) 50 OUTPUT (mVdc) ACTUAL 40 30 20 10 0 0 PRESSURE (kPA) THEORETICAL OFFSET (VOFF) MAX POP SPAN (VFSS)
+ 125C
280 420 PRESSURE DIFFERENTIAL
Figure 2. Output versus Pressure Differential
Figure 3. Linearity Specification Comparison
SILICONE GEL DIE COAT WIRE BOND
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE ELEMENT P2
DIE BOND
LEAD FRAME
Figure 4. Cross-Sectional Diagrams (not to scale)
Figure 4 illustrates the differential or gauge configuration in the basic chip carrier (Case 344-15). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX700 series pressure sensor operating character-
istics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
Motorola Sensor Device Data
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
ABSOLUTE ELEMENT P2
DIFFERENTIAL/GAUGE STAINLESS STEEL DIE METAL COVER P1 EPOXY CASE
SILICONE GEL ABSOLUTE DIE COAT DIE P1
STAINLESS STEEL METAL COVER EPOXY CASE
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
DIE BOND
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MPX700 SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which isolates the die from the environment. The differential or gauge sensor is designed to operate with positive differential
Part Number MPX700A, MPX700D MPX700DP MPX700AP, MPX700GP MPX700GVP MPX700AS, MPX700GS MPX700ASX, MPX700GSX MPX700GVSX Case Type 344-15C 344C-01 344B-01 344D-01 344E-01 344F-01 344G-01
pressure applied, P1 > P2. The absolute sensor is designed for vacuum applied to P1 side. The Pressure (P1) side may be identified by using the table on the below:
Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Stainless Steel Cap Side with Port Attached Side with Port Attached Stainless Steel Cap
ORDERING INFORMATION MPX700 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure connections.
MPX Series Device Type DiT Basic Element Ported Elements Options Oi Absolute, Differential Differential Absolute, Gauge Gauge Vacuum Absolute, Gauge Stove Pipe Absolute, Gauge Axial Gauge Vacuum Axial Case Type C T Case 344-15 Case 344C-01 Case 344B-01 Case 344D-01 Case 344E-01 Case 344F-01 Case 344G-01 Order Number MPX700A MPX700D MPX700DP MPX700AP MPX700GP MPX700GVP MPX700AS MPX700GS MPX700ASX MPX700GSX MPX700GVSX Device Marking MPX700A MPX700D MPX700DP MPX700AP MPX700GP MPX700GVP MPX700A MPX700D MPX700A MPX700D MPX700D
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Motorola Sensor Device Data
MPX700 SERIES
PACKAGE DIMENSIONS
C R M B -A- N
PIN 1
1 2 3 4
NOTES: POSITIVE PRESSURE (P1) 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). DIM A B C D F G J L M N R INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30_ NOM 0.475 0.495 0.430 0.450 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30_ NOM 12.07 12.57 10.92 11.43
L
-T- J
SEATING PLANE POSITIVE PRESSURE (P1)
G F
4 PL
D
0.136 (0.005)
M
TA
M
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344-15 ISSUE W
SEATING PLANE
-T- R H N
PORT #1 POSITIVE PRESSURE (P1)
-A- U L
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC
-Q-
B
12 34
PIN 1
K S F G D 4 PL 0.13 (0.005)
-P- 0.25 (0.010) J C
M
TQ
S
DIM A B C D F G H J K L N P Q R S U
M
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344B-01 ISSUE B
Motorola Sensor Device Data
5
MPX700 SERIES
PACKAGE DIMENSIONS -- CONTINUED
V R
PORT #2 PORT #1
-A- U W H
PORT #2 VACUUM (P2)
L
PORT #1 POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G H J K L N P Q R S U V W INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.248 0.278 0.310 0.330 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 6.30 7.06 7.87 8.38
N
-Q-
SEATING PLANE
B
SEATING PLANE PIN 1
1234
-P- -T- J C 0.13 (0.005)
M
K
S
-T-
0.25 (0.010)
M
TQ
S G D 4 PL
F
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344C-01 ISSUE B
-A- -T- R N -Q-
SEATING PLANE PORT #2 VACUUM (P2)
U L H
POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.158 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC
B
12 34
K S
PIN 1
DIM A B C D F G H J K L N P Q R S U
C J -P- 0.25 (0.010)
M
F TQ
S
G D 4 PL 0.13 (0.005)
M
TS
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344D-01 ISSUE B
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Motorola Sensor Device Data
MPX700 SERIES
PACKAGE DIMENSIONS -- CONTINUED
PORT #1 POSITIVE PRESSURE (P1)
C
BACK SIDE VACUUM (P2)
A
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K N R S V INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.178 0.186 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 4.52 4.72 5.59 6.10 4.62 4.93
-B-
V
43 21 PIN 1
K J R
SEATING PLANE
S G F D 4 PL 0.13 (0.005)
M
N
-T-
TB
M
GROUND + OUTPUT + SUPPLY - OUTPUT
CASE 344E-01 ISSUE B
-T- C E A U -Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92
V
N R
PORT #1 POSITIVE PRESSURE (P1)
B
-P- 0.25 (0.010)
M
PIN 1
TQ
M
4
3
2
1
S K
DIM A B C D E F G J K N P Q R S U V
J
F D 4 PL 0.13 (0.005)
G
STYLE 1: PIN 1. 2. 3. 4. GROUND V (+) OUT V SUPPLY V (-) OUT
M
TP
S
Q
S
CASE 344F-01 ISSUE B
Motorola Sensor Device Data
7
MPX700 SERIES
PACKAGE DIMENSIONS -- CONTINUED
-T- C E
POSITIVE PRESSURE (P1)
A U
-Q-
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92
V
N R
B
PORT #2 VACUUM (P2)
PIN 1
-P- 0.25 (0.010)
M
TQ
M
1
2
3
4
S K
DIM A B C D E F G J K N P Q R S U V
J
F D 4 PL 0.13 (0.005)
G
M
TP
S
Q
S
STYLE 1: PIN 1. 2. 3. 4.
GROUND V (+) OUT V SUPPLY V (-) OUT
CASE 344G-01 ISSUE B
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315
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